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This study introduces a robust through-focus scanning optical microscopy (TSOM) system for precise 3D nanoscale measurements. The enhanced TSOM system overcomes optical and mechanical noise, enabling high-volume nanomanufacturing applications.

Keywords:
Multiple parameter measurementobjective scanningsimulating algorithmthrough-focus scanning optical microscopy

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Area of Science:

  • Optical Microscopy
  • Nanoscale Metrology
  • Optical Engineering

Background:

  • Through-focus scanning optical microscopy (TSOM) is valuable for nanoscale measurement but is susceptible to optical and mechanical noise.
  • Existing TSOM methods face challenges in sensitivity and application for comprehensive 3D parameter extraction.

Purpose of the Study:

  • To investigate the sensitivity and applicability of TSOM for three-dimensional (3D) multiple parameter measurement.
  • To develop and validate a robust TSOM system and simulation algorithm capable of overcoming noise interference.

Main Methods:

  • A novel TSOM system utilizing objective scanning and a corresponding simulation algorithm were developed.
  • Experimental validation was performed on an isolated gold (Au) line, establishing a matching library.
  • 3D multiple parameters were extracted by comparing experimental and simulated TSOM images.

Main Results:

  • The proposed TSOM system demonstrated robustness against optical and mechanical noises.
  • Precise 3D multiple parameter results were successfully extracted for the gold line.
  • Fidelity tests confirmed the system's accuracy for through-focus image analysis.

Conclusions:

  • The developed TSOM system offers enhanced sensitivity and reliability for 3D nanoscale measurements.
  • The system's noise robustness makes it suitable for high-volume nanomanufacturing.
  • This advancement facilitates more accurate and efficient nanoscale metrology.