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Updated: Jan 26, 2026

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Analytical performance of μ-groove silicon attenuated total reflection waveguides
Julian Haas1, Anja Müller2, Lorenz Sykora2
1Insitute of Analytical and Bioanalytical Chemistry, Ulm University, Albert-Einstein-Allee 11, 89081 Ulm, Germany. boris.mizaikoff@uni-ulm.de.
Abstract:
The analytical performance of micromachined μ-groove silicon attenuated total reflection (ATR) elements has been evaluated in a comparison of Fourier-transform infrared (FTIR) and quantum cascade laser (QCL) spectroscopy operating at mid-infrared (MIR) wavelengths. μ-Groove silicon ATR elements are highly efficient micromachined waveguides fabricated at a wafer scale at such low cost that they may be considered a consumable for single-time-use, e.g., in medical application scenarios. Herein, exemplary analytes haven been used for reliably evaluating their analytical performance (i.e., acetate and carbonate) in terms of sensitivity, noise level, and achievable limits of detection in a comparison of broadband vs. narrowband infrared spectroscopy.
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