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3-D Design and Simulation of a Piezoelectric Micropump

Seyed Amir Fouad Farshchi Yazdi1, Alberto Corigliano2, Raffaele Ardito3

  • 1MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy. seyedamir.farshchi@polimi.it.

Micromachines
|April 21, 2019
PubMed

Keywords:
finite element method (FEM)fluid–structure interaction (FSI)micro electromechanical systems (MEMS)multiphysics simulationpiezoelectric material

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