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Updated: Jan 26, 2026

Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies
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Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

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Surface Structure Dependence of Mechanochemical Etching: Scanning Probe-Based Nanolithography Study on Si(100),

Chen Xiao1,2, Xiaojun Xin3, Xin He2

  • 1Tribology Research Institute, State Key Laboratory of Traction Power , Southwest Jiaotong University , Chengdu 610031 , China.

ACS Applied Materials & Interfaces
|April 23, 2019
PubMed

Keywords:
crystallographic anisotropymechanochemical etchingscanning probe-based lithographysiliconsurface energy

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