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Three-to-One Internal Resonance in MEMS Arch Resonators

Ze Wang1, Jianting Ren2

  • 1School of Mechanics, Civil Engineering and Architecture, Northwestern Polytechnical University, Xi'an 710129, China. wangze0127@mail.nwpu.edu.cn.

Sensors (Basel, Switzerland)
|April 24, 2019
PubMed
Summary

This study explores the nonlinear dynamics of microelectromechanical systems (MEMS) arches under combined AC/DC loading and internal resonance. Findings reveal energy transfer between modes and complex behaviors like Hopf bifurcations.

Keywords:
Hopf bifurcationMEMS arch resonatorsnonlinear dynamicsthree-to-one internal resonance

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