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Effect of Thickness of Molybdenum Nano-Interlayer on Cohesion between Molybdenum/Titanium Multilayer Film and Silicon

Huahai Shen1, Bing Yao2, Jianwei Zhang3

  • 1Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China. huahaishen@caep.cn.

Nanomaterials (Basel, Switzerland)
|April 25, 2019
PubMed

Keywords:
cohesioninterlayernano-indenterresidual stresstitanium film

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