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Updated: Jan 25, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

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Signal correction by detection of scanning position in a white-light interferometer for exact surface profile

Songjie Luo, Takamasa Suzuki, Osami Sasaki

    Applied Optics
    |May 3, 2019
    PubMed

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