Leaky Scanning
Trial and Error and Algorithm
Scanning Electron Microscopy
Interference and Diffraction
Phase Contrast and Differential Interference Contrast Microscopy
Voltammetric Techniques: Linear-Scan (E vs Time)
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
A novel doubled-period grating (DPG) method precisely measures scan angle errors in scanning beam interference lithography (SBIL). This technique achieves high-quality grating fabrication with sub-15 microradian precision.
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