Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Muhammad Ammar Khan1, Jing-Fu Bao2, Fei-Hong Bao3

  • 1School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China. ammar@uestc.edu.cn.

Micromachines
|May 5, 2019
PubMed

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