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Vertical, capacitive microelectromechanical switches produced via direct writing of copper wires

Zhiran Yi1,2, Jianjun Guo1, Yining Chen3

  • 1Zhejiang Key Laboratory of Additive Manufacturing Materials, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China.

Microsystems & Nanoengineering
|May 7, 2019
PubMed

Keywords:
copper microwiredirect writingmicroelectromechanical switch

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