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Monolithic ultrasound fingerprint sensor.

Xiaoyue Jiang1, Yipeng Lu2, Hao-Yen Tang3

  • 1Department of Mechanical Engineering, University of California, Berkeley, CA 94720, USA.

Microsystems & Nanoengineering
|May 7, 2019
PubMed
Summary

This study introduces a novel MEMS ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer (PMUT) array. It achieves high resolution for imaging epidermis and sub-surface fingerprints, meeting consumer standards.

Keywords:
fingerprint sensorspiezoelectric micromachined ultrasonic transducer (PMUT)ultrasound

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Biometric Sensors
  • Ultrasonic Imaging

Background:

  • Consumer fingerprint sensors require high resolution (500 DPI).
  • Previous ultrasonic sensors faced limitations in achieving this resolution.
  • Integration of piezoelectric micromachined ultrasonic transducer (PMUT) arrays with CMOS electronics is crucial for on-chip imaging.

Purpose of the Study:

  • To develop a high-resolution MEMS ultrasonic fingerprint sensor.
  • To meet the 500 DPI standard for consumer applications.
  • To enable imaging of both epidermis and sub-surface fingerprint layers.

Main Methods:

  • Designed and fabricated a 110x56 PMUT array with reduced pitch (30x43 μm²) for high fill-factor (51.7%).
  • Integrated the PMUT array with custom CMOS ASIC for signal processing.
  • Employed a pulse-echo ultrasonic imaging approach on a chip.

Main Results:

  • Achieved 591x438 DPI resolution, meeting the 500 DPI standard.
  • Demonstrated 2 mV/kPa sensitivity and 15 kPa pressure output.
  • Obtained 75 μm lateral and 150 μm axial resolution within a 4.6 mm x 3.2 mm image.

Conclusions:

  • Successfully demonstrated the first MEMS ultrasonic fingerprint sensor capable of imaging epidermis and sub-surface layers.
  • The sensor design achieves high fill-factor and resolution through optimized PMUT scaling and integration.
  • This technology offers a promising advancement for secure and detailed biometric authentication.