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A Nonlinear Lumped Equivalent Circuit Model for a Single Uncollapsed Square CMUT Cell.

Mohammad Maadi, Roger J Zemp

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|May 7, 2019

Summary

A new nonlinear equivalent circuit model accurately predicts the behavior of square membrane capacitive micromachined ultrasonic transducers (CMUTs). This model aids in designing CMUT arrays for medical imaging and therapy.

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Area of Science:

Electrical Engineering
Materials Science
Biomedical Engineering

Background:

Capacitive micromachined ultrasonic transducers (CMUTs) are crucial for ultrasound applications.
Existing models often lack accuracy for large-scale or non-circular CMUT designs.
Accurate modeling is essential for optimizing CMUT performance in arrays.

Purpose of the Study:

To develop a precise nonlinear large-signal equivalent circuit model for square membrane CMUTs.
To validate the model's predictions against finite-element modeling and experimental data.
To provide a framework for designing and modeling large-scale CMUT arrays.

Main Methods:

Developed a nonlinear lumped equivalent circuit model using analytical calculations.
Employed finite-element analysis (FEA) for model tuning and validation.
Fabricated square and circular membrane CMUTs using a sacrificial release process.

Main Results:

The developed model demonstrated excellent agreement with FEA results for square CMUT dynamics.
Experimental measurements of resonance frequencies and displacements closely matched model predictions.
The model accurately captures the behavior of both square and circular CMUT cells.

Conclusions:

The new equivalent circuit model offers high accuracy for square membrane CMUTs.
This modeling approach is valuable for the design and simulation of CMUT arrays.
The framework supports advancements in ultrasound imaging and therapy applications using CMUT technology.