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Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

Chunpeng Ai1, Xiaofeng Zhao2, Sen Li3

  • 1Key Laboratory of Electronics Engineering College of Heilongjiang Province, Heilongjiang University, Harbin, Heilongjiang Province 150006, China. aichunpeng@hlju.edu.cn.

Micromachines
|May 22, 2019
PubMed

Keywords:
Li-doped ZnO thin filmMEMS technologyacceleration sensorcantilever beamdouble piezoelectric layer

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