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A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold

Xinxin Fu1,2, Qian Chen3,4, Xinyu Chen5,6

  • 1Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing 210093, China. flexxie@smail.nju.edu.cn.

Micromachines
|May 24, 2019
PubMed

Keywords:
induction heatingnickel moldrapid heatingthermal nanoimprint lithography

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