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Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres
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Analytical Prediction of Subsurface Damages and Surface Quality in Vibration-Assisted Polishing Process of Silicon

Yan Gu1, Yan Zhou2, Jieqiong Lin3

  • 1Key Laboratory of Micro/Nano and Ultra-precision Manufacturing, School of Mechatronic Engineering; Changchun University of Technology, Changchun 130012, China. guyan@ccut.edu.cn.

Materials (Basel, Switzerland)
|May 30, 2019
PubMed

Keywords:
SiC ceramicsfinite element simulationprediction of subsurface damagesvibration-assisted polishing

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