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Updated: Jan 24, 2026

Implementation of a Reference Interferometer for Nanodetection
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Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

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3D push-pull heterodyne interferometer for SPM metrology.

T V Kazieva, K L Gubskiy, A P Kuznetsov

    Applied Optics
    |June 4, 2019
    PubMed
    Summary

    A new laser interferometer achieves subnanometer resolution for probe microscope scanners, ensuring measurement traceability. This advanced system minimizes errors for highly accurate dimensional metrology.

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