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Tuning the Doping Ratio and Phase Transition Temperature of VO2 Thin Film by Dual-Target Co-Sputtering

Xu Chen1,2, Mingfei Wu3,4, Xingxing Liu5

  • 1School of Materials Science and Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China. cxzhixin0211@163.com.

Nanomaterials (Basel, Switzerland)
|June 5, 2019
PubMed

Keywords:
VO2co-sputteringdopingphase transitionthin films

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