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Effect of Sputtering Temperature on Fluorocarbon Films: Surface Nanostructure and Fluorine/Carbon Ratio

Qi Zhao1, Feipeng Wang2, Kaizheng Wang3

  • 1State Key Laboratory of Power Transmission Equipment & System Security and New Technology, Chongqing University, Chongqing 400044, China. zhaoqi@cqu.edu.cn.

Nanomaterials (Basel, Switzerland)
|June 6, 2019
PubMed

Keywords:
fluorocarbonsputtering temperaturesurface nanostructuresurface properties

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