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Updated: Jan 23, 2026

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Realization of alignment-tolerant grating couplers for z-cut thin-film lithium niobate
Abstract:
We present the design, modeling, fabrication, and characterization of grating coupler devices for z-cut lithium niobate near 1550 nm. We first experimentally measure the sensitivity of the insertion loss of a conventional grating coupler to translational misalignment through a three-factor full factorial design of experiment. Next, we design grating couplers that are significantly less sensitive to misalignment. The fabricated devices experienced less than 7 dB of excess insertion loss for combined misalignments of up to ± 5 μm in plane and up to -2 μm or + 10 μm out of plane.
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