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Remote Tracking of Phase Changes in Cr2AlC Thin Films by In-situ Resistivity Measurements
Bastian Stelzer1, Xiang Chen2, Pascal Bliem2
1Materials Chemistry, RWTH Aachen University, D-52074, Aachen, Germany. stelzer@mch.rwth-aachen.de.
Abstract:
Resistivity changes of magnetron sputtered, amorphous Cr2AlC thin films were measured during heating in vacuum. Based on correlative X-ray diffraction, in-situ and ex-situ selected area electron diffraction measurements and differential scanning calorimetry data from literature it is evident that the resistivity changes at 552 ± 4 and 585 ± 13 °C indicate the phase transitions from amorphous to a hexagonal disordered solid solution structure and from the latter to MAX phase, respectively. We have shown that phase changes in Cr2AlC thin films can be revealed by in-situ measurements of thermally induced resistivity changes.
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