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Updated: Jan 23, 2026

Patterning Cells on Optically Transparent Indium Tin Oxide Electrodes
Published on: August 20, 2007
Continuous-wave operation of a semipolar InGaN distributed-feedback blue laser diode with a first-order indium tin
Abstract:
A novel approach to realize DFB gratings on GaN based laser diodes is presented and continuous-wave single longitudinal mode operation is achieved. The first order gratings were fabricated on the surface of indium tin oxide (ITO) on top of the laser ridge, which combines the benefits of simplified fabrication, easy scalability to wider ridges, and no regrowth or overgrowth. Under continuous-wave operation, the laser emits with a full FWHM of 5 pm, a SMSR of 29 dB and output power from a single facet as high as 80 mW. To the best of authors' knowledge, this is also the first demonstration of a DFB-LD on semipolar InGaN/GaN system.
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