A Nonlinear Rate Microsensor utilising Internal Resonance

Micro- and nano-resonators have been studied extensively both for the scientific viewpoint to understand basic interactions at small scales as well as for applied research to build sensors and mechanical signal processors. Majority of the resonant microsystems, particularly those manufactured at a large scale, have employed simple mechanical structures with one dominant resonant mode, such as in timing resonators, or linearly coupled resonant modes, as in vibratory gyroscopes. There is an increasing interest in the development of models and methods to better understand the nonlinear interactions at micro- and nano-scales and also to potentially improve the performance of the existing devices in the market beyond limits permissible by the linear effects. Internal resonance is a phenomenon that allows for nonlinear coupling and energy transfer between different vibration modes of a properly designed system. Herein, for the first time, we describe and experimentally demonstrate the potential for employing internal resonance for detection of angular rate signals, where the Coriolis effect modifies the energy coupling between the distinct drive and sense vibration modes. In doing so, in addition to providing a robust method of exciting the desired mode, the proposed approach further alleviates the mode-matching requirements and reduces instabilities due to the cross-coupling between the modes in current linear vibratory gyroscopes.