Programmable terahertz chip-scale sensing interface with direct digital reconfiguration at sub-wavelength scales

Area of Science:

• Terahertz (THz) technology
• Chip-scale sensing
• Electromagnetic metamaterials

Background:

• Terahertz (THz) wave sensing is crucial for applications like chemical sensing, biomedical imaging, spectroscopy, and security.
• Current THz sensors have limited responsivity, restricted to narrow ranges of frequency, angle of incidence, and polarization.
• Integrating multiple sensing capabilities can enhance THz sensing robustness, versatility, and enable real-time imaging.

Purpose of the Study:

• To develop a miniaturized, chip-scale THz sensor with programmable control over multiple incident field properties.
• To demonstrate simultaneous programmability of frequency, pattern, and polarization within a single THz sensor.
• To implement this technology in a standard 65-nm CMOS process for practical applications.

Main Methods:

• Designing a continuous electromagnetic interface at deep subwavelength scales for direct programming.
• Integrating frequency, pattern, and polarization programmability into a single chip-scale sensor.
• Utilizing a standard 65-nm CMOS fabrication process.

Main Results:

• Demonstrated a chip-scale THz sensor capable of simultaneous programmability across frequency (0.1-1.0 THz), angle of incidence, and polarization.
• Successfully programmed the sensor's response by directly manipulating the continuous electromagnetic interface.
• The implemented sensor operates at room temperature.

Conclusions:

• The developed approach enables a single chip-scale THz sensor to be programmed for diverse sensing needs, overcoming limitations of traditional sensors.
• This technology offers a robust and versatile platform for advanced THz sensing, imaging, and spectroscopy.
• The CMOS compatibility and methodology allow for potential extension to other spectral regions and technology substrates.