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Related Experiment Video

Updated: Jan 22, 2026

Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors

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Published on: January 29, 2013

Electrical detection SPR sensor with grating coupled backside illumination.

Yoshiki Saito, Yosuke Yamamoto, Tetsuo Kan

|June 30, 2019

Summary

This summary is machine-generated.

A novel surface plasmon resonance (SPR) sensor uses a gold grating on silicon to detect analytes electrically. This new sensor technology enables direct electrical detection of surface plasmon resonance, offering a promising tool for various sensing applications.

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Area of Science:

Optoelectronics
Nanotechnology
Surface Science

Background:

Surface Plasmon Resonance (SPR) is a label-free optical sensing technique.
Conventional SPR sensors require bulky optical components for detection.
Electrical detection methods for SPR are highly desirable for miniaturization and integration.

Purpose of the Study:

To propose and demonstrate a novel current detection surface plasmon resonance (SPR) sensor.
To integrate SPR excitation and detection onto a single chip using a gold grating on an n-Si wafer.
To enable electrical readout of SPR signals for simplified sensor design.

Main Methods:

Fabrication of a sensor chip with a gold grating on an n-type silicon (n-Si) wafer.
Illumination of the device from the backside to excite SPR via grating diffraction.
Formation of a Schottky barrier diode at the Au/n-Si interface for current signal generation.
Measurement of angular current spectra to analyze SPR coupling.

Main Results:

Successful excitation and coupling of SPR at the Au/analyte interface through grating diffraction.
Detection of SPR as a measurable current signal via the Schottky barrier diode.
Experimental angular current spectra showed excellent agreement with theoretical SPR coupling predictions.
Demonstrated the feasibility of electrical detection of samples on the gold surface.

Conclusions:

The proposed sensor effectively couples and detects SPR signals electrically.
The integration of grating-diffracted SPR with a Schottky barrier diode enables direct electrical readout.
This approach offers a pathway towards simplified, miniaturized, and cost-effective SPR sensors.