Translational MEMS Platform for Planar Optical Switching Fabrics.

Area of Science:

• Optoelectronics
• Microelectromechanical Systems (MEMS)

Background:

• 3D MEMS for optical switching face design, fabrication, and packaging challenges.
• Complex structures and tight alignment tolerances hinder development.

Purpose of the Study:

• To present a 2D translational MEMS platform for efficient planar optical switching.
• To integrate MEMS with silicon nitride (SiN) optical waveguides.

Main Methods:

• Utilized parallel plate actuators for discrete lateral displacement of a central platform.
• Simulated MEMS designs using static structural analysis in ANSYS.
• Fabricated designs via custom processes and the PiezoMUMPs process.

Main Results:

• Achieved 3.37 µm displacement in two directions at 65 V actuation voltage.
• Closed a 4.26 µm air gap between waveguides at 50 V.
• Demonstrated over 99% butt-coupling efficiency and zero crosstalk between SiN waveguides.

Conclusions:

• The 2D MEMS platform offers a viable solution for efficient planar optical switching.
• Integration with SiN waveguides enables high performance and minimal crosstalk.
• The platform supports multiple waveguide configurations with precise alignment.