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Updated: Jan 22, 2026

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon

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Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma

Matt Thompson1, Luke Magyar2, Cormac Corr2

  • 1Research School of Physics and Engineering, Australian National University, Canberra, ACT, 2601, Australia. matt.a.thompson@anu.edu.au.

Scientific Reports
|July 14, 2019
PubMed

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