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Updated: Jan 22, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Enrico Coiera1, Baki Kocaballi1, John Halamka2
11Australian Institute of Health Innovation, Macquarie University, Level 6 75 Talavera Rd, Sydney, NSW 2109 Australia.
This study corrects a previous article DOI. The correction ensures accurate referencing for scientific research and data integrity in the field.
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