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Deep plasmonic direct writing lithography with ENZ metamaterials and nanoantenna

Huiwen Luo1, Jin Qin1, Edward Kinzel2

  • 1Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei City, Anhui Province 230026, People's Republic of China.

Nanotechnology
|July 23, 2019
PubMed
Abstract

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