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Investigation of Acoustic Injection on the MPU6050 Accelerometer.

Yunfan Zhang1, Hui Li2,3, Shengnan Shen4,5

  • 1School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China.

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|July 25, 2019
PubMed
Summary
This summary is machine-generated.

Acoustic injection can cause micro-electro-mechanical systems (MEMS) failures. This study reveals MPU6050 accelerometers fail due to acoustic-solid resonance, particularly at 11,566 Hz, when sound pressure exceeds 100 dB.

Keywords:
MEMS accelerometeracoustic injectioncapacitordeformationresonant frequency

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Area of Science:

  • Engineering
  • Materials Science
  • Physics

Background:

  • Micro-electro-mechanical systems (MEMS) are susceptible to failures from acoustic injection.
  • The microprocessor unit 6050 (MPU6050) accelerometer is a critical component often affected by such failures.

Purpose of the Study:

  • To investigate the failure mechanism of the MPU6050 accelerometer under acoustic injection.
  • To determine the effects of sound frequencies, pressures, and directions on MPU6050 performance.

Main Methods:

  • Experimental analysis using a custom testing system for MPU6050 performance under acoustic injection.
  • Finite element modeling (FEM) and acoustic-solid coupling simulations to analyze acoustic impacts on the sensor layer.
  • MEMS disassembly and MATLAB-based geometric modeling for accurate FEM.

Main Results:

  • Experimental and simulation results show strong agreement.
  • MPU6050 failure is most probable at a sound frequency of 11,566 Hz.
  • Failure occurs when sound pressure exceeds 100 dB, leading to sensor errors.

Conclusions:

  • The primary failure mechanism involves acoustic-solid resonance causing relative shifts in capacitor plates.
  • This resonance leads to the detection of false signals and erroneous data output from the MPU6050.
  • MPU6050 reliability is maintained below 100 dB sound pressure, with stress concentrating on the center linkage.