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Updated: Jan 21, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Design and Performance of a J Band MEMS Switch

Naibo Zhang1, Ze Yan2, Ruiliang Song3

  • 1The 54th Research Institute of China Electronic Science and Technology Group Corporation, Beijing 100070, China. zhangnaibai@163.com.

Micromachines
|July 25, 2019
PubMed

Keywords:
J bandMEMSswitch

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