Polarization independent dielectric metasurface for infrared beam steering applications

Over the past years, metasurfaces have been of great interest due to their ability manipulate optical wavefront by introducing a phase gradient across the transverse directions of the wave. This phase gradient was usually realized using plasmonic resonators which had high intrinsic losses. Here, we demonstrate, numerically, a proof of principle of an all-dielectric silicon based metasurface at the infrared (IR) range that manipulates the wave front and achieves beam steering with significantly high transmission. The proposed cross-shaped unit cell design shows high transmission with the ability to fully control the phase of the transmitted wave from 0 to 2π. The metasurface is made of silicon cross resonators, arranged to have a linear phase gradient, on SiO₂ substrate which makes the device compatible with most standard semiconductor fabrication techniques.