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High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform
Optics Letters
|August 2, 2019
Summary
We developed high-frequency resonant acousto-optic modulators (AOMs) using micro-electro-mechanical systems (MEMS) technology. These devices achieve GHz frequency modulation with high efficiency, enabling new optical and RF applications.
Area of Science:
- Photonics and Micro-Electro-Mechanical Systems (MEMS)
Background:
- Traditional acousto-optic modulators (AOMs) have limitations in frequency and efficiency.
- Micro-scale devices offer potential for enhanced performance through novel designs.
Purpose of the Study:
- To design and characterize high-frequency, resonant AOMs using a MEMS foundry process.
- To explore the use of suspended geometries for enhanced acousto-optic modulation.
Main Methods:
- Fabrication of doubly resonant cavity AOMs within a MEMS foundry.
- Utilized short acoustic and optical cavity lengths (∼10.5 μm).
- Investigated modulation efficiency at GHz frequencies based on cavity boundary displacement.
Main Results:
- Successfully measured acousto-optic modulation at GHz frequencies.
- Achieved high modulation efficiency due to the resonant cavity design.
- Demonstrated enhanced modulation in suspended device geometries.
Conclusions:
- The developed MEMS-based AOMs offer high-frequency operation and efficiency.
- This platform is a promising building block for advanced optical and RF systems.
- Potential applications include 2D spatial light modulators and low-cost optical links.
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