Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept
Graniel Harne A Abrenica1, Mikhail V Lebedev, Antoine Pacco
1Department of Chemistry, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium.
Abstract:
We study the anisotropy in surface oxidation for Ge(100) and (110) in HCl/H2O2 solution complemented by synchrotron X-ray photoemission spectroscopy (SXPS) measurements integrated with an in situ etching chamber. Visual anisotropic demonstration is confirmed by lithographic Ge nanowedges.
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