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A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film

Yue Shi1, Liang He2, Fangcao Guang1

  • 1School of Printing and Packaging Engineering, Beijing Institute of Graphic Communication, Beijing 102600, China.

Micromachines
|August 23, 2019
PubMed

Keywords:
chemical vapor depositionphotoluminescencephysical vapor depositionsilicon oxynitridethin film

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