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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
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Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices.
Siegfried B Menzel1, Marietta Seifert2, Abhinav Priyadarshi3
1Leibniz IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany. s.menzel@ifw-dresden.de.
Materials (Basel, Switzerland)
|August 24, 2019
Summary
This study developed advanced (molybdenum-lanthanum oxide) thin films for high-temperature sensors. These (Mo-La 2 O 3 ) multilayer systems demonstrate excellent thermal stability up to 800°C.
Area of Science:
- Materials Science
- Nanotechnology
- Sensor Technology
Background:
- Advanced thin film materials are crucial for high-temperature surface acoustic wave (SAW) sensor applications.
- Molybdenum (Mo) thin films are promising but require enhanced high-temperature stability.
- Lanthanum oxide (La 2 O 3 ) incorporation is explored to improve Mo film properties.
Purpose of the Study:
- To investigate the effect of lanthanum oxide interlayers on the electrical resistivity and high-temperature stability of molybdenum thin films.
- To fabricate and characterize (Mo-La 2 O 3 ) multilayer systems for potential use in demanding environments.
- To understand the structural evolution of lanthanum oxide within molybdenum thin films during fabrication and annealing.
Main Methods:
- Fabrication of 100 nm thick (Mo-La 2 O 3 ) multilayer systems on SiO 2 /Si substrates using magnetron sputter deposition.
- Inclusion of extremely thin (≤1 nm) lanthanum (La) interlayers between adjacent Mo layers.
- Controlled oxidation of La interlayers and subsequent annealing at 800°C in high vacuum for up to 120 hours.
Main Results:
- Formation of a continuous La 2 O 3 layer for 1 nm La interlayers, and a mixed (La 2 O 3 -Mo) structure with nm-sized La 2 O 3 particles for thinner interlayers.
- Molybdenum thin films with La 2 O 3 interlayers exhibited stable electrical properties at elevated temperatures.
- The (Mo-La 2 O 3 ) multilayer systems demonstrated remarkable stability up to 800°C for 120 hours in high vacuum.
Conclusions:
- Lanthanum oxide interlayers significantly enhance the high-temperature stability of molybdenum thin films.
- The developed (Mo-La 2 O 3 ) multilayer system is a promising candidate for high-temperature SAW sensor applications.
- Controlled incorporation of La 2 O 3 provides a pathway to engineer robust thin films for extreme conditions.
Keywords:
Mo-La2O3 multilayersSAW sensorsdispersion strengtheninghigh-temperature stabilityinterdigital transducer materialMore Related Videos
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