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Removal of fine particles from IC chip carbonization process in a rotating packed bed: Modeling and assessment

Tse-Lun Chen1, Tzu-Hao Huang1, Ching-Hsiang Hsu2

  • 1Graduate Institute of Environmental Engineering, National Taiwan University, No. 71, Chou-Shan Road, Taipei City, 10673, Taiwan.

Chemosphere
|August 26, 2019
PubMed

Keywords:
Fine particle controlIC chip carbonizationResponse surface methodologyRotating packed bedSemi-theoretical model

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