A Large Measurable Range Capacitance-to-Digital Converter for Smart Humidity Sensors
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Updated: Jan 20, 2026

Hybrid Printing for the Fabrication of Smart Sensors
Published on: January 31, 2019
Rongshan Wei1, Weiwen Lin2, Xiaoxia Xiao2
1College of Physics and Information Engineering, Fuzhou University, Fuzhou 350116, China. wrs08@fzu.edu.cn.
Abstract:
This study aims to propose a capacitance-to-digital converter (CDC) based on a third-order cascade of integrators with a feed-forward (CIFF) incremental sigma-delta modulator for smart humidity sensor application. Disguised zoom-in technology was proposed to enlarge the measurable range of the CDC. The input range of the CDC was 0-388 pF. The proposed CDC was realized using 0.18 μm complementary metal-oxide-semiconductor technology. Results show that the CDC performs a 13-bit capacitance-to-digital conversion in 0.8 ms. The analog system consumes 169.7 μA from a 1.8 V supply, which corresponds to a figure of merit (FOM) of 3.0 nJ/step. The proposed CDC was combined with a HS1101 humidity sensor to demonstrate its incorporation in an overall system design. The resolution was 0.7% relative humidity (RH) over a range of 30%-90% RH.
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