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This study quantifies uncertainties in scanning electron microscope (SEM) point spread function (PSF) determination using nanoparticle calibration. Key parameters like signal type and particle size significantly impact PSF, highlighting the need for careful calibration.

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Area of Science:

  • Materials Science
  • Microscopy
  • Metrology

Background:

  • Accurate determination of the scanning electron microscope's (SEM) point spread function (PSF) is crucial for high-resolution imaging.
  • A novel nanoparticle calibration method has been developed for PSF determination.
  • Uncertainty analysis of parameters influencing PSF has been previously unstudied.

Purpose of the Study:

  • To investigate the impact of various parameters on the PSF determined by nanoparticle calibration in SEM.
  • To quantify the uncertainty introduced by these parameters on PSF size and shape.
  • To provide insights for optimizing PSF determination in SEM.

Main Methods:

  • Utilized a nanoparticle calibration method for PSF determination in SEM.
  • Investigated parameters including signal type, support material thickness, reference particle size, PSF smoothing (K), and background correction.
  • Complemented experimental data with CASINO simulations.
  • Analyzed the effect of detector position differences between observed and simulated particles.

Main Results:

  • Signal type influenced PSF shape, causing shifts between secondary and backscattered electron PSFs due to detector position differences.
  • Support material thickness had a negligible effect on PSF at tested voltages.
  • Reference particle size uncertainty resulted in a ±0.7 nm variation in PSF full width at half maximum (FWHM) at 2σ.
  • PSF smoothing (K) and background correction introduced variations within ±0.9 nm FWHM, with a larger variation (±1.9 nm) at 2 kV due to noise.

Conclusions:

  • Several parameters introduce significant uncertainty into SEM PSF determination, affecting PSF size and shape.
  • Understanding the interplay of these parameters is essential for accurate PSF measurement.
  • Tailoring calibration parameters like K and background correction for specific conditions can minimize PSF uncertainty.