Enhanced Carbon Nanotubes Growth Using Nickel/Ferrocene-Hybridized Catalyst

Tall, crystalline carbon nanotubes (CNTs) are desired to successfully integrate them in various applications. As the crystallinity of CNTs improves with increasing growth temperatures, higher growth temperatures are required to obtain crystalline CNTs. However, in a typical chemical vapor deposition (CVD) process, CNT growth rate reduces when the growth temperature exceeds a specific level due to the degradation of the catalyst particles. In this study, we have demonstrated the improved catalytic activity of nickel/ferrocene-hybridized catalyst as compared to sole ferrocene catalyst. To demonstrate this, CNTs are grown on bare silicon (Si) as well as nickel (Ni) catalyst-deposited substrates using volatile catalyst source (ferrocene/xylene) CVD at the growth temperatures ranging from 790 to 880 °C. It was found that CNTs grown on bare Si substrate experience a reduction in height at growth temperature above 860 °C, whereas the CNTs grown on 10 nm Ni catalyst-deposited substrates experience continuous increase in height as the temperature increases from 790 to 880 °C. The enhancement in the height of CNTs by the addition of Ni catalyst is also demonstrated on 5, 20, and 30 nm Ni layers. The examination of CNTs using electron microscopy and Raman spectra shows that the additional Ni catalyst source improves the CNT growth rates and crystallinity, yielding taller CNTs with a high degree of structural crystallinity.