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Related Experiment Video

Updated: Jan 20, 2026

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Photon-counting laser interferometer for absolute distance measurement on rough surface.

Chengkai Pang1, Di Wu1, Haotian Shi1

  • 1State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.

The Review of Scientific Instruments
|September 2, 2019
PubMed
Summary

This study presents a dual-wavelength photon-counting laser interferometer for precise distance measurement. Integrating laser triangulation enhances non-ambiguity range to 6.5 mm with a 18 nm standard deviation.

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Area of Science:

  • Optics and Photonics
  • Metrology and Measurement Science
  • Laser Interferometry

Background:

  • Absolute distance measurement of noncooperative targets is challenging due to surface roughness.
  • Photon-counting interferometry offers high sensitivity for weak optical interference.
  • Dual-wavelength interferometry is used to extend the unambiguous measurement range.

Purpose of the Study:

  • To design and implement a dual-wavelength photon-counting laser interferometer.
  • To achieve high-precision absolute distance measurements for noncooperative targets.
  • To enhance the range of nonambiguity beyond the limitations of standard dual-wavelength interferometry.

Main Methods:

  • Utilized a single-photon detector to measure weak optical interference on rough surfaces.
  • Employed a dual-wavelength laser interferometer configuration.
  • Integrated laser triangulation for coarse distance measurement to extend the unambiguous range.

Main Results:

  • Achieved a measurement standard deviation of approximately 18 nm within an experimental range of 1.1 mm.
  • The initial non-ambiguity range was less than 1.2 μm.
  • Integration of laser triangulation increased the non-ambiguity range to 6.5 mm.

Conclusions:

  • The developed dual-wavelength photon-counting laser interferometer enables precise absolute distance measurements.
  • The combined approach of photon-counting and laser triangulation significantly improves the non-ambiguity range.
  • This technique is suitable for metrology applications requiring high accuracy on challenging surfaces.