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Updated: Jan 19, 2026
Scanning Electron Microscopy SEM: Operation, Image Analysis
Published on: April 30, 2023
3D surface topography imaging in SEM with improved backscattered electron detector: Arrangement and reconstruction
A A Borzunov1, V Y Karaulov2, N A Koshev3
1Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia.
Abstract:
We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imaging of relatively smooth surface topography using the scanning electron microscope (SEM). The new arrangement of backscattered electrons detector plates allows decreasing the initial energy of the electron probe, which makes this SEM technique to be suitable for usage on radiation-sensitive samples like biological tissues. Experiments show high effectiveness of the method, which improves both the gradient sensitivity of the signal and the signal to noise ratio.
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