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Updated: Jan 19, 2026

Scanning Electron Microscopy SEM: Operation, Image Analysis
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3D surface topography imaging in SEM with improved backscattered electron detector: Arrangement and reconstruction

A A Borzunov1, V Y Karaulov2, N A Koshev3

  • 1Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia.

Ultramicroscopy
|September 9, 2019
PubMed
Summary

We developed a new shape from shading technique for 3D surface reconstruction using scanning electron microscopy. This method enhances imaging of smooth surfaces, especially for radiation-sensitive biological tissues.

Keywords:
3D topographyBackscattered electrons detectorReconstruction algorithmScanning electron microscopy

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Area of Science:

  • Materials Science
  • Imaging Technology
  • Microscopy

Background:

  • 3D surface reconstruction is crucial for understanding material properties and biological structures.
  • Traditional scanning electron microscopy (SEM) techniques can be limited by sample sensitivity to radiation.
  • Shape from shading (SFS) offers a non-contact method for surface topography analysis.

Purpose of the Study:

  • To introduce a novel SFS technique for enhanced 3D surface reconstruction in SEM.
  • To adapt SEM for imaging radiation-sensitive samples, such as biological tissues.
  • To improve gradient sensitivity and signal-to-noise ratio in surface imaging.

Main Methods:

  • Implementation of a new backscattered electron detector plate arrangement in SEM.
  • Modification of electron probe energy for reduced sample damage.
  • Application of the developed SFS technique to smooth surface topography.

Main Results:

  • The new SFS technique significantly improves 3D surface reconstruction accuracy.
  • The method demonstrates suitability for radiation-sensitive biological samples.
  • Enhanced gradient sensitivity and signal-to-noise ratio were experimentally verified.

Conclusions:

  • The proposed SFS technique offers a valuable advancement for SEM-based 3D surface imaging.
  • This method expands the applicability of SEM to delicate and radiation-sensitive materials.
  • The improvements in signal quality pave the way for more detailed surface analysis.