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Scanning Electron Microscopy SEM: Operation, Image Analysis
Published on: April 30, 2023
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3D surface topography imaging in SEM with improved backscattered electron detector: Arrangement and reconstruction
A A Borzunov1, V Y Karaulov2, N A Koshev3
1Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia.
Ultramicroscopy
|September 9, 2019
Summary
We developed a new shape from shading technique for 3D surface reconstruction using scanning electron microscopy. This method enhances imaging of smooth surfaces, especially for radiation-sensitive biological tissues.
Area of Science:
- Materials Science
- Imaging Technology
- Microscopy
Background:
- 3D surface reconstruction is crucial for understanding material properties and biological structures.
- Traditional scanning electron microscopy (SEM) techniques can be limited by sample sensitivity to radiation.
- Shape from shading (SFS) offers a non-contact method for surface topography analysis.
Purpose of the Study:
- To introduce a novel SFS technique for enhanced 3D surface reconstruction in SEM.
- To adapt SEM for imaging radiation-sensitive samples, such as biological tissues.
- To improve gradient sensitivity and signal-to-noise ratio in surface imaging.
Main Methods:
- Implementation of a new backscattered electron detector plate arrangement in SEM.
- Modification of electron probe energy for reduced sample damage.
- Application of the developed SFS technique to smooth surface topography.
Main Results:
- The new SFS technique significantly improves 3D surface reconstruction accuracy.
- The method demonstrates suitability for radiation-sensitive biological samples.
- Enhanced gradient sensitivity and signal-to-noise ratio were experimentally verified.
Conclusions:
- The proposed SFS technique offers a valuable advancement for SEM-based 3D surface imaging.
- This method expands the applicability of SEM to delicate and radiation-sensitive materials.
- The improvements in signal quality pave the way for more detailed surface analysis.
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