Epoxy Resins for Negative Tone Photoresists

Vitor Vlnieska1,2, Andrey Mikhaylov3, Margarita Zakharova3

  • 1Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany. vitor.vlnieska@kit.edu.

Polymers
|September 11, 2019
PubMed

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