Dual-layer waveguide grating antenna with high directionality for optical phased arrays

Area of Science:

• Photonics and Optical Engineering
• Integrated Optics
• Antenna Technology

Background:

• High directionality is crucial for waveguide grating antennas used in optical phased arrays.
• Existing designs face limitations in achieving optimal directional performance.

Purpose of the Study:

• To propose and evaluate a novel Si3N4/Si dual-layer structure for enhanced waveguide grating antenna directionality.
• To investigate the impact of grating placement on antenna performance.

Main Methods:

• Fabrication of a dual-layer Si3N4/Si structure with grating patterns on the Si3N4 layer.
• Characterization of the waveguide grating antenna's directional properties.

Main Results:

• Achieved high directionality exceeding 89%.
• Demonstrated the effectiveness of the Si3N4/Si dual-layer structure.
• The developed waveguide grating antenna has a length exceeding 4 mm.

Conclusions:

• The proposed Si3N4/Si dual-layer structure significantly improves waveguide grating antenna directionality.
• This advancement is vital for the development of high-performance optical phased arrays.