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Related Experiment Video

Updated: Jan 19, 2026

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High-speed polarized low coherence scanning interferometry based on spatial phase shifting.

Jun Woo Jeon, Hee Won Jeong, Hyo Bin Jeong

    Applied Optics
    |September 11, 2019
    PubMed
    Summary

    This study introduces polarized low coherence scanning interferometry (PLCSI) for faster surface measurements. PLCSI uses spatial phase shifting for enhanced speed and reduced data, improving upon traditional low coherence scanning interferometry.

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    Area of Science:

    • Optical Metrology
    • Surface Characterization
    • Interferometry

    Background:

    • Traditional low coherence scanning interferometry (LCSI) is limited by scanning speed due to Nyquist sampling and equidistant step requirements.
    • These limitations restrict measurement speed and increase data acquisition in surface profiling.

    Purpose of the Study:

    • To introduce polarized low coherence scanning interferometry (PLCSI) for significantly enhanced measurement speed.
    • To demonstrate PLCSI's ability to overcome the limitations of conventional LCSI.
    • To validate PLCSI's performance in reconstructing surface profiles.

    Main Methods:

    • Utilizing a polarized CMOS camera for spatial phase shifting.
    • Implementing PLCSI to extract correlogram visibility at each scanning step.
    • Employing larger scanning step sizes, unconstrained by Nyquist limits.

    Main Results:

    • Successfully reconstructed surface profiles of various specimens (plane mirror, concave mirror, step height) using PLCSI.
    • Demonstrated that PLCSI achieves higher measurement speeds compared to typical LCSI.
    • Confirmed significant data reduction due to larger scanning step sizes.

    Conclusions:

    • PLCSI offers a substantial advancement in measurement speed for surface profiling.
    • The technique effectively reconstructs surface topography with reduced data acquisition.
    • PLCSI presents a viable and efficient alternative to conventional scanning interferometry methods.