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Updated: Jan 19, 2026

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
Fabrication of Silica Nanoparticle Monolayer Arrays Using an Anodic Aluminum Oxide Template
Kazutoshi Sekiguchi1,2, Takayuki Nakanishi1, Hiroyo Segawa1,3
1Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo University of Science, 6-3-1 Niijuku, Katsushika-ku, Tokyo 125-8585, Japan.
Abstract:
Non-close-packed (NCP) silica nanoparticle monolayer arrays (SNMA) on ordered porous anodic aluminum oxide (AAO) templates were fabricated for the first time by a novel two-step spin-coating technique. The obtained NCP-SNMA-AAO was composed of silica nanoparticles (average primary particle size of 440 nm) and well-organized nanopores on the AAO substrates. NCP-SNMA-AAO with a supporting ratio of 87% silica nanoparticles showed a hydrophilic surface (water contact angle of 51.0°), while the original AAO substrate shows a hydrophobic surface (water contact angle of 107.9°). The maximum coefficient of static friction was decreased by 29% (0.327 → 0.233). The coefficient of dynamic friction was also decreased by 20% (0.281 → 0.226). We found that controlling the silica supporting ratio using the two-step spin-coating technique is an effective approach for surface modification of an AAO substrate.
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