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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

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On-chip 1 by 8 coarse wavelength division multiplexer and multi-wavelength source on ultra-silicon-rich nitride

George Feng Rong Chen, Ju Won Choi, Ezgi Sahin

    Optics Express
    |September 13, 2019
    PubMed

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