Transport Properties and Finite Size Effects in β-Ga₂O₃ Thin Films

Thin films of the wide band gap semiconductor β-Ga₂O₃ have a high potential for applications in transparent electronics and high power devices. However, the role of interfaces remains to be explored. Here, we report on fundamental limits of transport properties in thin films. The conductivities, Hall densities and mobilities in thin homoepitaxially MOVPE grown (100)-orientated β-Ga₂O₃ films were measured as a function of temperature and film thickness. At room temperature, the electron mobilities ((115 ± 10) cm²/Vs) in thicker films (>150 nm) are comparable to the best of bulk. However, the mobility is strongly reduced by more than two orders of magnitude with decreasing film thickness ((5.5 ± 0.5) cm²/Vs for a 28 nm thin film). We find that the commonly applied classical Fuchs-Sondheimer model does not explain sufficiently the contribution of electron scattering at the film surfaces. Instead, by applying an electron wave model by Bergmann, a contribution to the mobility suppression due to the large de Broglie wavelength in β-Ga₂O₃ is proposed as a limiting quantum mechanical size effect.