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Related Experiment Video

Updated: Jan 18, 2026

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
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Exploring the accurate size measurement method for two typical nanostructures basing on SEM imaging.

Peng Zhang1

  • 1School of Electronic Information Engineering, Yangtze Normal University, Chongqing 408100, PR China.

Micron (Oxford, England : 1993)
|September 29, 2019
PubMed
Summary

Accurate aspect ratio measurement for gold nanorods and linewidth measurement for silicon trapezoidal lines were achieved using Monte Carlo simulations. An image-based method minimizes errors in nanorod aspect ratio determination.

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Area of Science:

  • Nanotechnology
  • Semiconductor Industry
  • Materials Science

Background:

  • Accurate size measurement is crucial for nanotechnology and semiconductor applications.
  • Gold nanorods and silicon trapezoidal lines are common nanostructures requiring precise dimensional analysis.
  • Aspect ratio significantly impacts the optical properties of gold nanorods.

Purpose of the Study:

  • To develop and validate an accurate method for measuring the aspect ratio of gold nanorods using Monte Carlo simulations.
  • To systematically analyze the measurement bias for top and bottom critical dimensions (CD) of silicon trapezoidal lines.

Main Methods:

  • Utilized a sophisticated Monte Carlo scanning electron microscope simulation tool.
  • Employed an image-based method combined with Monte Carlo simulation for aspect ratio measurement.
Keywords:
LinewidthMonte Carlo simulationNanorodsSize measurement

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  • Performed systematic calculations of measurement bias for silicon trapezoidal lines under varying parameters.

    • Main Results:

    • An image-based method using specific peak distances in a line-scan profile achieved minimum error for gold nanorod aspect ratio.
    • The bias for bottom critical dimension (CD) measurement in silicon trapezoidal lines is less than for top CD.
    • Measurement bias is influenced by side wall angle, primary electron energy, and trapezoid top surface width.

    Conclusions:

    • The developed Monte Carlo simulation-based method provides accurate aspect ratio measurements for gold nanorods.
    • Understanding and quantifying measurement bias is essential for accurate linewidth determination in silicon trapezoidal structures.
    • Simulation tools are vital for optimizing measurement strategies in advanced nanostructure fabrication and characterization.