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Updated: Jan 18, 2026

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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
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Ultra-Large-Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Based on Thin LiNbO3
Summary
This study optimizes Lithium Niobate (LiNbO3) plate acoustic wave (PAW) resonators for ultra-wideband filters. Researchers achieved a high coupling coefficient and suppressed spurious signals for next-generation tunable filters.
Area of Science:
- Materials Science
- Acoustic Devices
- Filter Technology
Background:
- Lithium Niobate (LiNbO3) is a key material for piezoelectric devices.
- Plate Acoustic Wave (PAW) resonators are crucial for advanced filtering applications.
- Optimizing SH0 mode propagation is essential for high-performance resonators.
Purpose of the Study:
- To establish a design foundation for SH0 mode PAW resonators using LiNbO3.
- To enhance resonator performance for ultra-wideband and tunable filters.
- To investigate and mitigate spurious signal generation in these resonators.
Main Methods:
- Analysis of SH0 mode propagation characteristics in LiNbO3 plates.
- Optimization of the coupling coefficient (k2) for SH0 mode.
- Investigation of transducer types and electrode materials.
- Stopband dispersion analysis for edge-reflected resonators.
Main Results:
- Achieved an optimized coupling coefficient (k2) as high as 55%.
- Successfully controlled wideband spurious signals.
- Demonstrated the slow dispersion and IDT-defining frequency superiority of the SH0 mode.
- Proposed a novel perfect edge reflector to eliminate longitudinal spurious ripples.
Conclusions:
- The SH0 mode in LiNbO3 PAW resonators is highly suitable for ultra-wideband and tunable filters.
- Optimized design and novel reflectors significantly improve resonator performance by suppressing spurious signals.
- This work provides a foundation for next-generation acoustic wave filter design.
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